Ambient Temperature · LS65x.Lab.O / .R Piezo-Linear Stage

Details

Piezoelectric · Linear Motion— LS65x.Lab.O / .R (closed-loop)

Piezoelectric motion@RT solutions — “.Lab Series“ Well packaged piezoelectric motion unit

Piezo-Linear Stage with compact shape and no compromise on power performance; while guaranteeing a premium price space.

Product Features

• Ultra quiet motion, 20 kHz drive frequency

• 65 × 65 mm × 12 mm Extremely compact form factor

• closed-loop control · Position sensing supports resistance type(.R) and optical type(O.)

• Economy - Spatial Sensing Resolution(.R) 100-200nm

• Minimum pace better than 10 nm

• Multi-axis stacking mount adapters available

• Controller compatible with rotator, goniometer

• High Resolution - Spatial sensing resolution (.O) 1 nm, 10 nm selectable

• Supports non-magnetic (.NM), high vacuum (.HV) and ultra-high vacuum (.UHV) options

2D - Dimensional drawing

LS65x.Lab.O / .R Piezo-Linear Stage — Specification

Optional Versions ⇨	Default	.NM	.HV	.UHV
	.NM, Absolutely non-magnetic version； .HV, High vacuum version; .UHV, Ultra high vacuum version；
1 Bottom size*height	65 × 65 mm × 12 mm
2 Main Material	Stainless Steel	Pure Ti	Stainless Steel	Stainless Steel
3 Cables & Connectors	Standard shielded cable D-Sub 9 Connector		Kapton enameled Wire， PEEK-2mm Pin
Motion parameters - space recommended mounting form I. (The following properties are measured in the recommended installation form)
4 Travel	30 mm
5 MAX. Velocity	~ 20 mm/s
6 Min. Step	< 10 nm
7 Drive Frequency	Max. 20 kHz （Super quiet movement）
Maximum horizontal 8 force	2 N
9 Holding Force	5 N
10 Full-travel pitch/yaw	0.3 mrad / 0.2 mrad
Motion parameters - space recommended installation form II. (The following properties are measured in the recommended installation form)
11 Maximum vertical load	2 N
12 Holding Force	5 N
Sensing accuracy
13 Position Sensing Type	- Resistance type sensing ( .R ) - Optical scale sensing ( .O )
14 Position sensing range	30 mm
15 Position sensing resolution	- Resistance type sensing ( .R ), 100-200 nm - Optical scale sensing ( .O ), 10 nm ( default )，1nm ( option )