Ambient Temperature · 3-D Piezoelectric Scanning Table

Details

Piezoelectric motion@RT solutions — “.Lab Series“ 3 degrees of freedom scanning motion - precision optics, semiconductor characterization

Product Features

• Three-dimensional XY scanning motion 150 um × 150 um × 150 um

• External dimensions, 55 mm × 55 mm × 42 mm

• Closed-loop positioning accuracy better than 1 nm

• Maximum load 500 g

• Supports non-magnetic (.NM) and high vacuum (.UHV) option upgrades

2D - Dimensional drawing

S150.Lab.XYZ , 3-D piezoelectric scanning table — Specification

	.NM version, non-magnetic; .UHV version, compatible with 2E-11 mbar
General Information
1 Orientation of movement	X，Y，Z
2 Bottom size * height	55 mm × 55 mm × 55 mm
3 Main Material	Aluminum alloy / Stainless steel
4 Travel	150 um × 150 um × 150 um
Movement & Positioning
5 Motion Resolution	0.2 nm
6 Repeatable accuracy of motion	15 nm
7 Linearity error	< 0.1%
8 Resonance frequency - 50g load	220 Hz
9 Rigid	0.5 N/um
10 Maximum load	500 g
11 Closed-loop sensors	Capacitive
12 Capacitance accuracy	0.3 nm
13 Piezoelectric capacitance (X,Y)	Max. 120 V
Other
14 Operating temperature	-20 ~ 80 °C
15 Quality	200 g
16 Cable length	1.5 m / micro-Sub connector